Search T-Space Advanced Search
Home

Browse
Communities
& Collections

Issue Date
Author
Title
Subject

Sign on to:
Receive email
updates

My Account
authorized users

Edit Profile

Help
About T-Space
 Please use this identifier to cite or link to this item: http://hdl.handle.net/1807/18252

 Title: Novel MEMS Grippers for Pick-place of Micro and Nano Objects Authors: Chen, Ko Lun Brandon Jr. Advisor: Sun, Yu Department: Mechanical and Industrial Engineering Keywords: MicromanipulationMicrogrippers Issue Date: 13-Jan-2010 Abstract: Physical pick-and-place promises specificity, precision, and programmed motion, a feature making microrobotic manipulation amenable to automation for the construction of microsystems. Despite the significant progress made, a long-standing difficulty is the release of micro objects from the end effector due to strong adhesion forces at the micro scale. This research focuses on the development of microelectromechanical systems (MEMS) based microgrippers that integrate an active release mechanism for pick-and-release micromanipulation. The performance was experimentally quantified through the manipulation of 7.5-10.9µm glass spheres, and for the first time, achieves a 100% success rate in release (based on 700 trials) and a release accuracy of 0.45±0.24µm. Example patterns were then constructed through automated microrobotic pick-and-place of microspheres, achieving a speed of 6sec/sphere. To further miniaturize the devices for nanomanipulation, a novel fabrication process was developed. Through the manipulation of 100nm gold nano-particles inside a scanning electron microscope (SEM), preliminary demonstrations were made. URI: http://hdl.handle.net/1807/18252 Appears in Collections: MasterDepartment of Mechanical & Industrial Engineering - Master theses

Files in This Item:

File Description SizeFormat
Chen_KoLun_B_MASc_thesis.pdf3.1 MBAdobe PDF
View/Open

This item is licensed under a Creative Commons License

Items in T-Space are protected by copyright, with all rights reserved, unless otherwise indicated.