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Please use this identifier to cite or link to this item: http://hdl.handle.net/1807/18839

Title: Design and Analysis of a MEMS Vibration Sensor for Automotive Mechanical Systems
Authors: Rebello, Joel
Advisor: Cleghorn, William L.
Mills, James
Department: Mechanical and Industrial Engineering
Keywords: MEMS
vibration sensor
fault detection
Issue Date: 15-Feb-2010
Abstract: This thesis presents the theoretical analysis and experiment results of MEMS sensors designed for the application of low frequency vibration sensing. Each sensor consists of a proof mass connected to a folded beam micro-flexure, with an attached capacitive comb drive for displacement sensing. Three comb drive arrangements are evaluated, the transverse, lateral, and tri-plate differential. The sensors are fabricated using the well developed foundry processes of PolyMUMPS and SoiMUMPS. In addition, a capacitance to voltage readout circuit is fabricated using discrete components. Static tests, evaluating the capacitance to displacement relation, are conducted on a six degree of freedom robotic manipulator, and dynamic tests evaluating the sensor response to sinusoidal excitations are conducted on a vibrating beam. The end use of the sensor involves real-time vibration monitoring of automobile mechanical systems, such as power seats, windshield wipers, mirrors, trunks, and windows, allowing for early detection of mechanical faults before catastrophic failure.
URI: http://hdl.handle.net/1807/18839
Appears in Collections:Master
Department of Mechanical & Industrial Engineering - Master theses

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