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Please use this identifier to cite or link to this item: http://hdl.handle.net/1807/24267

Title: Optical and Structural Characterization of Amorphous Carbon Films
Authors: Mahtani, Pratish
Advisor: Kherani, Nazir P.
Zukotynski, Stefan
Department: Electrical and Computer Engineering
Keywords: amorphous carbon
Issue Date: 6-Apr-2010
Abstract: A fundamental study of the correlations between ion energy, substrate temperature, and plasma density with hydrogen content, percent sp2 bonding, optical gap, and refractive index of hydrogenated amorphous carbon (a-C) films is presented. A strong dependency between the ion energy used during deposition and the film’s microstructure is shown. Moreover, it is revealed that the optical properties of the a-C films are controlled by the concentration and size of sp2 clusters in the film. Through N2 mixing in the source gas, room-temperature nitrogen doped polymeric-like a-C films were demonstrated for the first time. X-ray Photoelectron Spectroscopy revealed an increase in the Fermi level of these films with increased nitrogen content. A proof-of-concept a-C based transparent heat mirror (THM) was demonstrated. It was shown that a-C acts as an oxygen-free protective barrier and anti-reflective coating for Ag films in the THM, increasing the transmission in the visible region by 10-20%.
URI: http://hdl.handle.net/1807/24267
Appears in Collections:Master
The Edward S. Rogers Sr. Department of Electrical & Computer Engineering - Master theses

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